Amorphous silicon solar cell

摘要

An amorphous silicon solar cell includes a substrate (11), a transparent electrode (12) formed on this substrate (11), a power-generating film (16) formed on this transparent electrode (12), and a back-side electrode (17) formed on this power-generating film (16). The power-generating film (16) is formed by sequentially stacking p-type/i-type/n-type hydrogenated amorphous silicon layers (13, 14, 15). The defect density of the i-type hydrogenated amorphous silicon layer (14) is less than 10<15> defects/cc.