METHOD AND DEVICE FOR INSPECTING OBJECTS

摘要

This invention relates to a method for contactless inspection of objects on a substrate, by means of an inspection device during relative motion between the substrate and the inspection device. The method comprises the steps of: generating a first image comprising object height information by illuminating at least a portion of the substrate comprising one or more objects by means of first radiation means and imaging at least one of said one or more objects illuminated by said first radiation means onto a two-dimensional matrix sensor means having a portionwise addressable matrix of pixel elements; generating a second image comprising object area information by illuminating at least a portion of the substrate comprising one or more objects by means of second radiation means and imaging at least one of said one or more objects illuminated by said second radiation means onto said sensor means; extracting the object height information, by means of said sensor means, from said first image; and extracting the object area information, by means of said sensor means, from said second image. The invention also relates to a device for performing the above method.