| 发明名称 |
FERROELECTRIC DEVICE WITH CAPPING LAYER AND METHOD OF MAKING SAME |
| 摘要 |
A ferroelectric device (100, 200) includes a ferroelectric layer (112) and an electrode (116, 110). The ferroelectric material is made of a perovskite or a layered superlattice material. A superlattice generator metal oxide is deposited as a capping layer (114, 204) between said ferroelectric layer and said electrode to improve the residual polarization capacity of the ferroelectric layer.
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| 申请公布号 |
WO0042643(A1) |
申请公布日期 |
2000.07.20 |
| 申请号 |
WO1999US24226 |
申请日期 |
1999.10.15 |
| 申请人 |
SYMETRIX CORPORATION;MATSUSHITA ELECTRONICS CORPORATION |
发明人 |
HAYASHI, SHINICHIRO;OTSUKI, TATSUO;PAZ DE ARAUJO, CARLOS, A. |
| 分类号 |
H01L21/02;H01L21/316;H01L21/8242;H01L27/108;(IPC1-7):H01L21/316 |
主分类号 |
H01L21/02 |
| 代理机构 |
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