发明名称 |
SENSOR AND METHOD FOR OPERATING THE SAME |
摘要 |
A sensor, in particular a micromechanical pressure sensor, has two identical capacitive partial structures coupled to an evaluation circuit. In the case of in-phase driving, an additive signal is present as a pressure-dependent useful signal. In the case of in-antiphase driving, a difference signal is present as a diagnostic signal. |
申请公布号 |
EP1019690(A1) |
申请公布日期 |
2000.07.19 |
申请号 |
EP19980956805 |
申请日期 |
1998.09.30 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
DRAXELMAYR, DIETER;TIMME, HANS-JOERG |
分类号 |
G01D5/24;G01L9/00;G01L9/12;(IPC1-7):G01L27/00;G01M17/007 |
主分类号 |
G01D5/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|