发明名称 |
ELECTRONIC/ELECTRIC COMPONENTS USED IN CLEAN ROOM AND SUBSTRATE TREATMENT APPARATUS |
摘要 |
An electronic/electric part used in a clean room in which the atmosphere is controlled to process a substrate in a semiconductor device industry, which contains a resin base material and additives added to the resin base material. The additives contain one or more materials selected from the group consisting of an anti-electrostatic agent made of a nonionic compound of a molecular weight of 350 or higher, an anti-oxidizing agent made of a phenolic compound of a molecular weight of 300 or higher, a lubricant, a plasticizer, a fire retardant, and a water repellent. The additives hardly releases gaseous organic substances from the resin base material under a condition where the part is used. <IMAGE> |
申请公布号 |
EP0971000(A4) |
申请公布日期 |
2000.07.19 |
申请号 |
EP19980910973 |
申请日期 |
1998.03.25 |
申请人 |
TOKYO ELECTRON LIMITED;TAISEI CORPORATION |
发明人 |
MATSUO, TAKENOBU;WAKABAYASHI, TSUYOSHI;SAITO, MISAKO;KOBAYASHI, SADAO;WAKAYAMA, YOSHIHIDE;IMAFUKU, MASAYUKI |
分类号 |
C08K5/00 |
主分类号 |
C08K5/00 |
代理机构 |
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地址 |
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