| 摘要 |
<p>An integrated circuit capacitor includes a substrate (24), a first dielectric layer (26) adjacent the substrate and having a first trench (28) therein, and a first metal plug (30) extending upwardly from the substrate into the first trench. An interconnection line (32) overlies the first trench and contacts the first metal plug to define anchoring recesses (34) on opposite lateral sides of the first metal plug. A second dielectric layer (36) is on the interconnection line and has a second trench (38) therein. A second metal plug (22) extends upwardly into the second trench. More particularly, the second metal plug includes a body portion (40) extending upwardly into the second trench, and anchor portions (42) connected to the body portion and engaging the anchoring recesses to anchor the second metal plug to the interconnection line. The capacitor stack (44,48,46) overlies the second trench and contacts the second metal plug. Because the second metal plug is anchored, a depth of the second trench can be greater, thereby increasing the surface area of the capacitor, without the metal plug becoming loose and separating from the underlying interconnection line. <IMAGE></p> |
