| 摘要 |
PROBLEM TO BE SOLVED: To obtain a beam shape correction optical system capable of easily correcting the beam shape of every kind by providing a 2nd holding part holding a beam expander in a rotatable state around a 2nd rotary axis parallel with a 2nd specified direction and set to be coaxial with a 1st rotary axis. SOLUTION: The holding part 12i (i=1, 2) is constituted so that it can hold the beam expanders 11i in the rotatable state around the rotary axis parallel with the specified direction, and the beam shape correction optical system is constituted by arranging 1st and 2nd shape correction devices 101 and 102 so that their rotary axis may be coaxial. The magnification of the beam expanders 111 and 112 constituting the beam shape correction optical system is decided based on the pupose of the beam shape correction optical system. By using this beam shape correction optical system, the beam shape of every kind is easily corrected because an incident beam is deformed according to the rotational angle just by rotating two beam expanders 111 and 112.
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