| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a work having a surface of high flatness and free from waviness by coating a holding surface of a holding disc body with a film obtained by thermosetting a thermosetting resin applied on the holding surface, and polishing the surface of the film. SOLUTION: A work holding surface 8 of a work holding disc body 2 is coated with a thermosetting resin film 3 having through holes 4. The work holding disc 1 for polishing is mounted on a polishing head, and set on a polishing device, a work is sucked in vacuum and held on a surface of the resin film 3 of the work holding surface 8 of the work holding disc body 2, and pressure contacted to the rotating polishing cloth, and a polishing agent is dropped to polish the work. Whereby the unevenness in adhesion generated when a resin plate is attached to the work holding disc surface of the holding disc body with an adhesive agent can be prevented, as a result, the waviness caused by the transferring of the unevenness in adhesion between the resin plate and the work holding disc to the work surface in the polishing work can be prevented. |
