SUBSTRATE HAVING ZINC OXIDE FILM AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To provide a zinc oxide film satisfying both piezoelectric characteristics and film stress in an angular velocity sensor film-formed on the surface of a silicon substrate and having the zinc oxide film as a piezoelectric element. SOLUTION: An angular velocity sensor 100 has a vibrator 2 formed by subjecting a silicon substrate 1 to etching or the like, a zinc oxide film 3 formed on the vibrator 2 as a piezoelectric element for driving and detecting the vibrator 2 and an electrode part 4 formed on the zinc oxide film 3 as a driving and detecting electrode, where the zinc oxide film 3 is composed of two layers continuously film-formed under different film forming conditions, i.e., of a seath layer 3a positioning at the base and for securing orientation properties and an upper layer 3b having film stress smaller than that of the seath layer 3a.