发明名称 THIN-FILM TRANSISTOR
摘要 PROBLEM TO BE SOLVED: To provide a satisfactory thin-film transistor. SOLUTION: In a thin-film transistor having a semiconductor layer 33 constituting a source/drain region and a channel formation region, the thickness of the source/drain region part is made thinner than the thickness of the semiconductor layer of the channel formation region part, so that a part where electric field concentration generated in a boundary between a source region 36 and a channel formation region 38 and a boundary between a drain area 37 and the channel formation region 38 is shifted from a part, where a channel is formed. Then, off-currents (leakage currents) are reduced, and by preventing on-currents from being reduced, high conductance is realized.
申请公布号 JP2000200912(A) 申请公布日期 2000.07.18
申请号 JP20000028461 申请日期 2000.02.04
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 KUSUMOTO NAOTO
分类号 H01L29/786;H01L21/336;(IPC1-7):H01L29/786 主分类号 H01L29/786
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