| 摘要 |
PROBLEM TO BE SOLVED: To provide a corrosion-resistant material having excellent corrosion resistance to the plasma of a halogen base gas used in manufacturing a semiconductor and a polyimide substrate, and in plasma-processing liquid crystal. SOLUTION: This corrosion-resistant material is a material exposed to plasma in manufacturing a semiconductor and a polyimide substrate and in plasma- processing liquid crystal, and is made of a base material such as ceramic, glass, metal, or metal base composite material and a magnesium oxide film arranged on the surface of the base material to improve its corrosion resistance.
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