| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical fiber supporting device for monitoring, which is simple and high in condensing ability, and a semiconductor device manufacturing device. SOLUTION: The optical fiber supporting device Al is provided with a lens holder 1 housing optical lenses 3, 4 and an optical fiber fixing part 5 provided with a fiber coupler 6 for holding the end part of an optical fiber F at its tip. A screw groove 9 to be engaged with a male screw formed on a cylindrical surface inside of the holder 1 is formed on a cylindrical surface outside of the part 5. It is possible to make the focal position of the lens 4 coincide with the end surface of the fiber F while making the optical axes of the lenses 3, 4 and the center of the fiber F coincide with each other by relatively rotating the holder 1 and the part 5. Optical observation can be executed by using this device Al.
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