| 摘要 |
An optical system includes a two-stage aberration corrector having a static corrector lying on the optical path and a dynamic corrector lying on the optical path. The static corrector is fixed and is selected to correct the fixed aberration component of an optical beam. The dynamic corrector is controllably variable to correct the variable, angle-dependent aberration component of the beam. The dynamic corrector includes an astigmatism generator, a power generator, and a coma generator. The optical system also includes a window through which the optical path passes prior to reaching the aberration corrector, and a sensor in the optical path after the beam passes through the aberration corrector.
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