| 摘要 |
PROBLEM TO BE SOLVED: To provide an antireflection-coating forming solution for rib forming, capable of forming a fine pattern superior in dimensional precision and leaving no residue on the pattern and to provide the rib-forming laminate, having an antireflection coating and the pattern forming method by composing the antireflection-coating of a specified light absorbing material. SOLUTION: This rib-forming antireflection-coating solution is that of the light absorbing material in an organic solvent. This light absorbing material is not especially limited but preferably, a dye absorbing a light in a wavelength region of 350-450 nm, embodied by azotype dyes, quinoline type dyes, anthraquinone type dyes and the like, and as the organic solvent, it may be used so far as it dissolves the antireflection coating and not especially limited, and toluene, xylene, ethylbenzene, and the like can be cited, A preferable content of the light absorbing material in the antireflection coating solution is 0.05-20 weight % of the organic solvent. When 0.05 weight %, the antireflection effect is not exhibited, and when 20 weight %, light absorption becomes too much, and it is made difficult to obtain a good pattern. |
