Powder-proof apparatus for a PECVD reactor chamber

摘要

A transparent powder-proof housing covers the heater block of a PECVD reactor chamber tightly, thereby to prevent from powder pollution while cleaning the interior of the reactor chamber. The transparent powder-proof housing has two outlets, one for connecting to a vacuum cleaner and the other for human operation inside the reactor chamber. The vacuum cleaner vacuums the powder dust out of the transparent powder-proof housing, thereby to largely reduce the powder pollution in a clean room and the chances to jeopardize human health.