发明名称 |
Wire cutting and feeding device for use in wire bonding apparatus |
摘要 |
In a wire cutting and feeding device used in a wire bonding apparatus, piezo-electric actuators are used as the driving source of a slide block which moves wire clamper toward and away from a workpiece upon which bonding is performed. The piezo-electric actuators include a feeding piezo-electric actuator, which causes expansion and contraction of the slide block, and two clamping piezo-electric actuators, which are alternately operated and clamp the slide block. The slide block is caused to move by means of respective power-"on"/power-"off" combinations of the feeding piezo-electric actuator and the two clamping piezo-electric actuators.
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申请公布号 |
US6089439(A) |
申请公布日期 |
2000.07.18 |
申请号 |
US19970801068 |
申请日期 |
1997.02.14 |
申请人 |
KABUSHIKI KAISHA SHINKAWA |
发明人 |
YAMAZAKI, NOBUTO;TORIHATA, MINORU;IIYAMA, TAKAYUKI |
分类号 |
H01L21/60;B23K20/02;(IPC1-7):B23K37/00 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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