| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously polish both surfaces and an end surface by providing a part to be contacted with a work, of a resin ring-shaped work protecting part mounted on an inner peripheral surface of a hole part of a carrier holding the work, with a hollow part having the shape same as the end surface of the work after polished. SOLUTION: A carrier is rotated between both surface plates 1, 2 by a driving device. On this occasion, the polishing liquid is supplied to both surfaces plates 1, 2 from a polishing liquid passage formed in advance. An end surface of a work 4 held in a carrier hole, is pressed to a contact part having the shape of an end surface part 6 of the work after its mirror finish, of a resin ring 5 mounted on an inner peripheral surface of the carrier hole part, by the frictional force generated between the polishing cloths contacted with both surfaces of the work and the work 4, while autorotating by the rotation of the surface plates and the rotation of the carrier 2, whereby the work is mirror finished. That is, the both surfaces and the end surface of the work 4 contacted with the polishing cloth or resin can be simultaneously polished. |
