发明名称 Six axis active vibration isolation and payload reaction force compensation system
摘要 An active vibration isolation and payload reaction force compensation system includes a number of isolation legs which support equipment subject to undesirable vibrations. Each leg includes an elastomeric support member which supports the mass of the equipment and attenuates seismic forces transmitted from the ground to the system. A number of force actuators fixed to each leg and to the equipment in oppositely directed pairs provide forces directed to compensate for motions of the equipment. Six accelerometers are provided on the equipment to measure accelerations in six degrees of freedom. A control system, responsive to signals from the accelerometers, causes actuation of the force actuators.
申请公布号 US6089525(A) 申请公布日期 2000.07.18
申请号 US19970946457 申请日期 1997.10.07
申请人 ULTRATECH STEPPER, INC. 发明人 WILLIAMS, MARK
分类号 G03F7/20;(IPC1-7):F16M13/00 主分类号 G03F7/20
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