| 摘要 |
PROBLEM TO BE SOLVED: To simplify manufacturing process and enable improvements and stability of characteristics by forming a ultrafine particle layer between a substrate and a piezoelectric layer, and making the main element of a ultra fine particle layer almost identical to the main element of a piezoelectric layer. SOLUTION: A lower electrode 4 is formed at a specified position on a substrate 3, and a ultrafine particle layer 1 which has the same crystal structure as that of a piezoelectric layer 2 and comprises ultrafine particles consisting of the same main element as the layer 2 is formed thereon. The ultrafine particle layer 1 comprises PZT. The PZT piezoelectric layer 2 is further formed thereon, and an upper electrode 5 is formed on the piezoelectric layer 2. Since the ultrafine particle layer 1, having the same crystal structure is interposed in a junction part between the substrate 3 and the piezoelectric layer 2 in this way, adhesion between the substrate 3 and the piezoelectric layer 2 can be improved. Since layers with the same crystal structure are mutually brought into contact with each other in a boundary surface of each layer, lattice interval of crystal forming each layer becomes small and lattice strain becomes small. As a result, adsorption and irregular reflection of piezoelectric vibration are hardly generated. |
