| 摘要 |
A vibration gyro sensor including a support having an approximately square planar contour with a central opening having an approximately circular planar configuration, an annular section arranged in the opening of the support and having an approximately circular planar contour for constructing a vibrator, and a plurality of resilient sections which span the inner circumference of the support and the outer circumfererence of the annular section. The support, the annular section, and the plurality of resilient sections constitute an integrated fired ceramic product. The vibration gyro sensor further includes piezoelectric/electrostrictive elements (driving piezoelectric/electrostrictive elements and detecting piezoelectric/electrostrictive elements) formed on upper surfaces of the respective resilient sections and/or thin-walled portions of the annular section. Each of the resilient sections has a thickness in its direction of height designed to be smaller than a thickness of thick-walled portions of the annular section. Both the thin-walled portions of the annular section and the resilient sections are thin-walled so that the rigidity in the direction of vibration of the piezoelectric/electrostrictive elements is lowered to give a large amplitude of vibration caused on the annular section (vibrator).
|
