| 摘要 |
There is provided a cooling system of a semiconductor testing device wherein the number of revolutions of a fan is controlled so as to obtain proper air-flow corresponding to a heating value for every operating mode of the measuring unit, thereby preventing power from being wasted. The cooling system of a semiconductor testing device comprises a fan for cooling the measuring unit by the rotation of a DC motor, a temperature sensor for measuring a temperature of the measuring unit which is cooled by the fan, and a temperature control/power supply unit for supervising temperature information which is supplied from the temperature sensor and executing optimum control of the number of revolutions of the fan corresponding to a heating value of the measuring unit for every operating mode. The temperature control/power supply unit executes optimum control of the number of revolutions of the fan by controlling a voltage of the DC motor to obtain air-flow needed for cooling the measuring unit corresponding to the heating value.
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