发明名称 |
Position detector for a spin-drying machine used in integrated circuit fabrication |
摘要 |
A position detector is provided for use on a spin-drying machine employed in integrated circuit (IC) fabrication to detect whether the spin-drying machine has shifted in position during operation. If the spin-drying machine is positioned incorrectly, the position detector is capable of stopping the operation of robot arms used to grab and position wafers on the spin-drying machine so that the robot arms will not be damaged or crash into the wafers on the spin-drying machine due to the incorrect positioning of the spin-drying machine. The position detector is designed for use on a spin-drying machine having a spinning unit, a fixed platform surrounding the spinning unit, and at least one robot arm mounted on the fixed unit. The position detector comprises a pair of emitters mounted on the spinning unit and a pair of oppositely arranged receivers on the fixed platform. In the event that the spinning unit has shifted in position, one or both of the paired emitter/receiver units generates an OFF signal indicative of such a condition. In response, a control unit stops the operation of the robot arm, so that the robot arm will not be damaged or crash into the wafers on the spin-drying machine.
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申请公布号 |
US6091339(A) |
申请公布日期 |
2000.07.18 |
申请号 |
US19990328057 |
申请日期 |
1999.06.08 |
申请人 |
UNITED SILICON INCORPORATED;UNITED MICROELECTRONICS CORP. |
发明人 |
CHUANG, MING-TE;LIN, YU-SHAN;LIN, KUN-FENG;CHEN, QING-YONG |
分类号 |
H01L21/00;(IPC1-7):G08B21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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