发明名称 |
Method and system for anomaly detection |
摘要 |
A system and method for detecting anomalies on a manufactured device includes or utilizes a moveable stage for holding and positioning the device, a camera for capturing an image of the device on the stage, a digitizer coupled to the camera for producing a digital-pixel-based representation of the image, and a computer having a processor and memory. The computer is coupled to the digitizer for receiving the digital-pixel-based representation from the digitizer and coupled to the stage for selectively moving the stage to align the device. The computer is programmed to be operable to symbolically decompose a digital-pixel-based representation of an image to create a primitive-based representation of the image. The image may be aligned by the computer with respect to the rotation of geometric objects in the image by developing a histogram of angles and lengths and matching them to determine a rotational shift.
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申请公布号 |
US6091846(A) |
申请公布日期 |
2000.07.18 |
申请号 |
US19970867156 |
申请日期 |
1997.05.30 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
LIN, YOULING;HENNESSEY, A. KATHLEEN;PATTIKONDA, RAMAKRISHNA;KHAJA, VEERA S.;REDDY, RAJASEKAR |
分类号 |
G01N21/95;G01N21/956;G06T7/00;H01L21/66;(IPC1-7):G06K9/00;G06K9/52;G06T7/60 |
主分类号 |
G01N21/95 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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