SENSOR FOR RECOGNIZING SURFACE SHAPE AND MANUFACTURE OF THE SAME

摘要

PROBLEM TO BE SOLVED: To stably attain surface shape detection with high sensitivity and high reliability for preventing the generation of electrostatic discharge damage breakdown generated at sensing. SOLUTION: Plural sensor electrodes 105, which are respectively isolatedly separated are formed on the same plane of inter-layer insulating films and opposed electrodes 107 are arranged on the sensor electrodes 105 so as to face at prescribed intervals while supported by support electrodes 106. Also, the sensor electrodes 105 and the support electrodes 106 are respectively covered with protecting films 105c and 106c, whose side faces and upper faces are made of Ru.