| 摘要 |
PROBLEM TO BE SOLVED: To obtain resolution exceeding a limit by the diameter of the intensity profile of a converged beam by providing an addition circuit for adding plural output signals from a digital processor group and outputting a video signal obtained by synthesizing plural pieces of image information obtained from plural detecting elements. SOLUTION: The output parts of respective photodetectors 6a to 6n are respectively connected to the digital processors 7a to 7n. The processors 7a to 7n are respectively provided with an A/D converter and a processing program so as to convert analog output signals from the photodetectors 6a to 6n into digital signals, and aberration compensation processing is individually performed concerning the digital output. In the case of such processing, processing is synchronously executed in the processors 7a to 7n by using a synchronizing signal from a frame synchronizing signal generator 8. Output signals from the processors 7a to 7n are supplied to the addition circuit 9, and image data obtained by the respective photodetectors 6a to 6n is collected to form a synthetic video signal and supplies it to a CRT 10.
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