| 摘要 |
PROBLEM TO BE SOLVED: To efficiently form a film having desired film quality performance. SOLUTION: In the case plasma is generated on the space between a film forming object arranged in a treating chamber fed with prescribed gas and a target to form a film on the surface of the film forming object, the film forming object is previously fitted to a prescribed fitting object, a treating object in a state in which the film forming object is fitted to the fitting object is fixed to a prescribed position in the treating chamber, and, by plasma generated on the space between the film forming object in the treating object and the target arranged at a prescribed position in the treating chamber separated from the film forming object by prescribed intervals and also so as to be confronted with each other, a film is formed on the surface of the film forming object.
|
