| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrapure water supply apparatus reduced in the possibility of the damage of an aseptic filter and capable of controlling a sterilizing time by the aseptic filter alone and a sterilizing method thereof. SOLUTION: In an ultrapure water supply apparatus 1 constituted of an ultrapure water making apparatus 1, a storage tank 2, a pipeline 4 guiding ultrapure water from the storage tank to a use place 3, an aseptic filter 5, a steam supply means 6 and a compressed air supply means 7, (1) the steam from the steam supply means is supplied to the primary side of the aseptic filter 5 to be discharged by first and second drain discharge means and (2) the steam from the steam supply means 6 is supplied to the storage tank 2 to be discharged by a third drain discharge means and (3) the compressed air from the compressed air supply means 7 is supplied to the primary side of the aseptic filter 5 and discharged by the first and second drain discharge means or discharged from the secondary side of the aseptic filter 5 through the storage tank 2 by the third drain discharge means. |
