发明名称 Semiconductor device including a crystalline silicon film
摘要 A semiconductor device having a CMOS structure comprising N-channel type and P-channel type insulated gate semiconductor devices combined in a complementary manner, wherein the threshold voltage of the insulated gate semiconductor devices is controlled by using the difference in work function between the gate electrode and the active layer. The present semiconductor device has excellent uniformity and reproducibility.
申请公布号 US6091115(A) 申请公布日期 2000.07.18
申请号 US19970970728 申请日期 1997.11.14
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 OHTANI, HISASHI;FUJIMOTO, ETSUKO
分类号 H01L27/092;H01L21/8238;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L27/092
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