发明名称 |
Semiconductor processing apparatus having lift and tilt mechanism |
摘要 |
A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear guide/actuator comprising a fixed frame and a movable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the movable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.
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申请公布号 |
US6091498(A) |
申请公布日期 |
2000.07.18 |
申请号 |
US19970991062 |
申请日期 |
1997.12.15 |
申请人 |
SEMITOOL, INC. |
发明人 |
HANSON, KYLE;DIX, MARK;ZILA, VLADIMIR;WOODRUFF, DANIEL J. |
分类号 |
B65G49/07;B25J9/06;C25D7/12;H01L21/00;H01L21/677;H01L21/68;H01L21/687;(IPC1-7):G01B11/14;G01N21/00 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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