ULTRASONIC VIBRATION BONDING RESONATOR WITH REMOVABLE WORKPIECE-ENGAGINGPORTIONS

摘要

A resonator for an ultrasonic bonding apparatus, which comprises: an ultrasonic horn having a recessed portion in the exterior surface and a threaded hole; a workpiece-engaging portion having a chip base fitted in the recessed portion and a chip body provided on the chip base; and a screw member having a screw portion to fit into the threaded hole and a through-hole through which the chip body extends without contacting said screw member. When the screw member is screwed into the threaded hole, the bonding portion is fixed to the ultrasonic horn and the chip body projects through the through-hole for contact with a workpiece.