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发明名称
摘要
申请公布号
JP3067139(B2)
申请公布日期
2000.07.17
申请号
JP19890281317
申请日期
1989.10.27
申请人
发明人
分类号
H01L27/06;H01L21/8222;H01L21/8248;H01L21/8249;H03K19/08;(IPC1-7):H01L21/824;H01L21/822
主分类号
H01L27/06
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代理人
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地址
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