| 发明名称 |
Crystalline SixCyNz and method for synthesis |
| 摘要 |
A novel material SiXCyNz, having a crystal structure similar to that of a.Si3N4 with carbon atoms substituting most of the Si sites, is synthesized in crystalline form onto crystalline Si substrates by microwave plasma enhanced decomposition of carbon, silicon and nitrogen containing gasses.
|
| 申请公布号 |
US6090358(A) |
申请公布日期 |
2000.07.18 |
| 申请号 |
US19970915173 |
申请日期 |
1997.08.20 |
| 申请人 |
NATIONAL SCIENCE COUNCIL OF REPUBLIC OF CHINA |
发明人 |
CHEN, LI-CHYONG;CHEN, KUEI-HSIEN;BHUSARI, DHANANJAY MANOHAR;CHEN, CHUN-KU |
| 分类号 |
C01B21/082;C23C16/36;(IPC1-7):C01B33/00 |
主分类号 |
C01B21/082 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
