METHOD FOR MANUFACTURING A PERMANENT MAGNET FILM

摘要

PURPOSE: A method for manufacturing a permanent magnet film is provided to reduce the manufacturing cost of the permanent magnet film by irradiating a laser beam on a target which is mounted in a reaction chamber. CONSTITUTION: In a method for manufacturing a permanent magnet film, a laser beam is irradiated on a target which is mounted in a reaction chamber. By irradiating the laser beam on the target which is mounted in the reaction chamber, the process variables and the thickness of the film is properly controlled. According to the method for manufacturing a permanent magnet film, the manufacturing cost of the permanent magnet film is reduced.