| 摘要 |
PURPOSE: An align key of the TMA device is provided to increase the production yield and to carry out the mask aligning process easily by depositing the second metal layer on the align key. CONSTITUTION: A device comprises a TMA module(1), a driving substrate(5), a transistor(40), an insulation layer(70), a protection layer(75), a second metal layer(80), a first sacrificial layer(85), an align key(90), an align part(95), an actuator(100), and a driving mirror(200). The actuator is formed on the upper part of the driving substrate and the driving mirror is formed on the upper part of the actuator. The driving substrate includes a plurality of transistors and the protection layer is provided on the driving substrate in order to protect the transistors from being destroyed. The low temperature oxide layer and the first metal layer are formed on the MOS transistor. The metal layer comprises a source line which is electrically connected with the source area, a drain pad which is electrically connected with the drain area and a gate line which is connected with the gate poly in the crossing direction with the source line.
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