SEMICONDUCTOR DEVICE FOR ELECTRO STATIC DISCHARGE PROTECTION

摘要

PURPOSE: A semiconductor device for Electro Static Discharge(ESD) protection is provided to protect an inner circuit against damage from ESD. CONSTITUTION: A semiconductor device for Electro Static Discharge(ESD) protection is located between an inner circuit and an input-pad connected to an input unit for protecting an inner circuit, in which a junction region of the input unit having metallic silicide layer on a upper side is contacted between the input-pad and the metallic silicide layer. So, The damage of exited electrons can be prevented by controlling the composition ratio of the metal and the silicide.