| 摘要 |
PURPOSE: A wafer probe system is provided to enhance productivity and check the conditions of the wafer or the system to perform test in optimum conditions through accumulated data. CONSTITUTION: A wafer probe system comprises a CPU(10), a memory(20) for storing data, a vision unit(30) capturing image data, a display(40), a display control(50) and a communication interface(60) for interfacing data transmission to a network. Data such as OCR, probe masks, probe card needle in a vision image are stored in the memory of hard disk by file unit or database. The data stored in the hard disk are consistently updated in FIFO(First Input First Output) order.
|
