| 摘要 |
PURPOSE: A structure of a cover in a semiconductor equipment is provided to stop a leak of a harmful solution such as a strong acid solution or a strong alkali solution due to opening of a cover. CONSTITUTION: A structure of a cover in a semiconductor equipment comprises a vessel(20), a cover(26), a guide(26b), and an interception member(24). The vessel is filled with a strong acid or a strong alkali solution and has an opening portion at it upper face. The cover comprises a handle(28) located at its upper face and a reinforcing plate(26a) located at its lower face. The guide guides liquid cohered on the lower face of the cover to an inner portion of the vessel. The interception member reduces the amount of the liquid by intercepting circulated gas.
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