METHOD FOR CONTROLLING REFRIGERANT IN COOLING DEVICE USED FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PURPOSE: A method for controlling refrigerant in a cooling device used for a semiconductor manufacturing equipment is provided to effectively control refrigerant remaining in a cooling loop. CONSTITUTION: To clean or repair a semiconductor manufacturing equipment, refrigerant in a cooling loop should be all eliminated. To do so, first of all nitrogen gas is supplied into the loop after a nitrogen supply valve(36) is open and an anti-counterflow valve(35) is close. The refrigerant is therefore discharged from the cooling loop passing through a chamber(1) and then stored in a tank(30). Next, the nitrogen supply valve(36) is close, and an incoming pipe(9) and an outgoing pipe(25) are released from the chamber(1). After the cleaning or repairing of the chamber(1) is completed, the anti-counterflow valve(35) is open and then a pump motor(37) begins to operate. The refrigerant in the tank(30) is therefore supplied into the cooling loop and circulates through a cooling block(10) of the chamber(1).