DIAMOND FILM AND PROCESS FOR PREPARING THE SAME

摘要

A diamond film of this invention is formed from growth nuclei distributed on a substrate at a density of at least 1x10<10> numbers/cm<2>, the film is dense, having flat surface and great freedom in the thickness of the continuous film. The growth nuclei can be distributed at such a high density by, for example, dispersing diamond grains of average diameter of no more than 0.1 mu m in an acid solution, and distributing the grains on a substrate immersed in the solution by any means including ultrasonic vibration and voltage application. Such techniques for nucleation are simple and excellent in repeatability. The diamond film is formed on the substrate using the diamond grains as the growth nuclei by the plasma CVD or any other techniques.