WAFER TABLE OF COOL DOWN CHAMBER,申请号KR20000003993U-传众专利搜索

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发明名称	WAFER TABLE OF COOL DOWN CHAMBER
摘要
申请公布号	KR200189249(Y1)	申请公布日期	2000.07.15
申请号	KR20000003993U	申请日期	2000.02.15
申请人	ANAM SEMICONDUCTOR.,LTD.	发明人	PARK, HYUNG RYUL
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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