发明名称 |
PRODUCTION PROCESS OF LOW TEMPERATURE COFIRED CERAMIC ON METAL(LTCC-M) BASE PLATE WITH FLAT SURFACE |
摘要 |
PURPOSE: A production process of a LTCC-M base plate is provided wherein a low temperature fired ceramic is attached to the both side of a metal base to minimize a camber and controls the change of a camber in the post-firing process so that a flip-chip is easily combined with the LTCC-M base plate. CONSTITUTION: A production process is as follows: (1) a first step which prepares the metal and multiple LTCC green tapes independently; (2) a second which prepares a first and a second green tape piled body on the basis of the LTCC green tapes in (1); (3) a third which attaches the first and the second green tape piled body to the upper and lower part of the metal base respectively and presses to form the pressed body; (4) a fourth which cofires the pressed body to form a small cofired LTCC-M body; (5) a fifth which polishes both ceramic surfaces of the cofired LTCC-M base plate; and (6) a sixth which forms a circuit pattern on the polished ceramic surface to complete the base plate.
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申请公布号 |
KR20000045203(A) |
申请公布日期 |
2000.07.15 |
申请号 |
KR19980061754 |
申请日期 |
1998.12.30 |
申请人 |
INSTITUTE FOR ADVANCED ENGINEERING |
发明人 |
PARK, SUNG DAE;MOON, JE DO;PARK, YOON HWE;KANG, HYUN KYU |
分类号 |
C04B37/00;C04B35/00;(IPC1-7):C04B37/00 |
主分类号 |
C04B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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