| 摘要 |
PURPOSE: A manifold for detecting a foreign matter in a reaction chamber is provided to enable a real-time detection. CONSTITUTION: A manifold includes a body(13) connected to a discharge pipe through an outlet(21). The body(13) of the manifold is preferably disposed adjacently to a reaction chamber so as to detect an extraneous matter contained in a discharge gas flowed through the discharge pipe from the chamber. The manifold further includes a laser module(14) for radiating a laser beam, a beam stopper(16) for receiving the laser beam and a detector(15) for detecting a degree of scattering of the laser beam. The laser module(14), the beam stopper(16) and the detector(15) are connected to the body(13) by respective connectors(19,17,18) such as a flange. In particular, the laser beam traveled from the laser module(14) to the beam stopper(16) collides with the extraneous matter in the discharge gas and then scattered. Therefore, the extraneous matter is detected by measurement of the scattering of the laser beam. The detector(15) is connected to a controller for deciding quantity and size of the detected extraneous matter.
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