APPARATUS FOR MEASURING OPTICAL CHARACTERISTICS OF ILLUMINATING SYSTEM FOR LIGHT EXPOSER

摘要

PURPOSE: An apparatus for measuring optical characteristics is provided to measure optical characteristics exactly and protect a measurer from the ultraviolet ray by recognizing images through a monitor. CONSTITUTION: An image former(21) forms an image of an object to be measured by the ultraviolet ray emitted from an illuminating system of a light exposure. A CCD camera(22) obtains the image formed on the image former(21). A monitor(23) receives an image signal from the CCD camera(22) and displays the image to be recognized by a measurer of optical characteristics. The image former(21) is vertically fixed with respect to the ultraviolet ray incident by a zig plate(24). The image former(21) includes a pin hole passing the ultraviolet ray for the object.