TEST PATTERN FOR MEASURING OVERLAPPING OF CONTACT HOLES

摘要

PURPOSE: A test pattern for measuring an overlapping of contact holes is provided to easily recognize a misalign of the contact holes by forming a relatively large conductive pattern. CONSTITUTION: A test pattern includes a first conductive layer(21) having a rectangular shape and a second conductive layer(25) having a rectangular shape which is disposed in a center of the first conductive layer(21). A plurality of contact holes(29) are formed at a boundary between the first conductive layer(21) and the second conductive layer(25). The contact holes(29) are arranged in a step-like form. The contact holes(29) are symmetrically positioned about the second conductive layer(25). The second conductive layer(25) is a straight type hollow bar.