METHOD FOR FABRICATING FERROELECTRIC CAPACITOR

摘要

PURPOSE: A method for fabricating a ferroelectric capacitor is provided which prevents the deterioration of the electrical characteristics of the capacitor by forming a bottom electrode and a top electrode with a metal oxide. CONSTITUTION: A method for fabricating a ferroelectric capacitor is to form a bottom electrode(4) and a top electrode(6) with a metal oxide. The ferroelectric capacitor comprises the bottom electrode, a dielectric film(5) and the top electrode. By forming the bottom electrode and the top electrode with a metal oxide, the decrease of the electrical characteristics of a device due to the stress between the electrode and the dielectric film is reduced, and the adhesion between each layer is improved.