EINRICHTUNG ZUR KOPPLUNG VON BE- UND ENTLADEGERÄTEN MIT HALBLEITERBEARBEITUNGSMASCHINEN

摘要

In a mobile housing is located an adjustable support for the feed and discharge appts., which can be high-adjusted between several vertical levels, one serving for loading the appts. and the other(s) for the supply of a semiconductor processing machine (3) by the appts. The housing is fitted with aligning and holding elements for fastening onto a coupler aligned with the semiconductor processing machine. Pref. the support is formed by an adjustable plate linked to a lift with the plate carried by a horizontally movable element secured to the lift.