CENTER ALIGNING DEVICE FOR WAFER AND METHOD THEREFOR

摘要

PURPOSE: A device for aligning a center of a wafer and a method for aligning the center of the wafer are provided to align the wafer mounted on a spindle chuck with low cost by reducing the number of cameras which are used to detect the center position of the wafer. CONSTITUTION: A center aligning of a wafer(2) is carried out by a driving device(100) in response to an analog signal of a wafer image. A host module(200) controls the center aligning process and a driving device control module(300) controls the operation of the driving device(100). An image treating module(400) exchanges the signals with the driving device control module(300) and transforms the analog signal attained by the driving device(100) to a digital image signal thereby detecting the position of the wafer(2) by using the image signal.