| 摘要 |
PURPOSE: A method for measuring the life of a silicon wafer is provided to stably and easily measure the life time of the silicon wafer with low cost by using wax. CONSTITUTION: A silicon wafer is cleaned by a cleaning solution and is dried. Then, wax compound is coated on a front surface of the silicon wafer in the thickness of 0.1-2.0 micro meters and the silicon wafer coated with the wax compound is dried at the temperature of 60-120°C. After that, the wax compound is coated on a rear surface of the silicon wafer in the thickness of 0.1-2.0 micro meters and the silicon wafer coated with the wax compound is dried at the temperature of 60-120°C. The wax compound includes 15-35 weight percent resin, 40-60 weight percent isopropyl alcohol and 5-45 weight percent toluene.
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