| 摘要 |
PURPOSE: A driving substrate of thin-film micromirror array-actuated(TMA) makes two MOS transistors in unit pixel, thereby preventing point defect or line defect. CONSTITUTION: A field oxidation layer defines the first and the second active regions of a dielectric substrate(510). The first MOS transistor(560) including the first gate electrode(560a), the first source region(560b) and the first drain region(560c) is formed in the upper of the first active region, and the second MOS transistor(570) including the second gate electrode(570a), the second source region(570b) and the second drain region(570c) is formed in the upper of the second active region. The first MOS transistor(560) and the second MOS transistor(570) hold a common source line(590) and a common drain pad(600) in common. The common source line(590) transmits the same display signal to the first source region(560b) and the second source region(570b). The first gate line(630) is electrically connected to an external pad and the second gate line(640) isn't electrically connected to the external pad. Therefore, The first MOS transistor(560) operates normally and the second MOS transistor(570) doesn't operate.
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