| 摘要 |
PROBLEM TO BE SOLVED: To faithfully move and position a movable body, even when giving a movement profile for re-accelerating and decelerating the movable body moving at fixed speed by an ultrasonic motor. SOLUTION: A device is composed of an ultrasonic motor 15 that forms the drive source of a stage 13, a position detection means 18 that detects the displacement of the stage 13, a control part 1 that performs PID arithmetic processing, based on a parameter that changes according to the position deviation between a position signal from the position detection means 18 and a position signal based on the movement profile of the stage 13 that has been set in advance and outputs a command signal to the ultrasonic motor 15. An offset signal 113 which exceeds the width of the dead zone of the ultrasonic motor 15, is superimposed to a command signal 112 of the control part 1, and at the same time, the offset signal 113 is changed based on the acceleration and speed difference at that time so that the offset signal is increased or decreased linearly, when reacceleration or deceleration in the movement profile of the stage 13 is made, thus constituting a guiding device using the ultrasonic motor 15 as the drive source of the stage 13. |
